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经营范围
发明名称
ION IMPLANTING APPARATUS
摘要
申请公布号
JPS6372055(A)
申请公布日期
1988.04.01
申请号
JP19860213911
申请日期
1986.09.12
申请人
HITACHI LTD
发明人
FUJIKURA YOICHI
分类号
H01L21/265;H01J37/317
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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