DRY-ETCHING PROCESS AND ITS USE,申请号EP19830107604-传众专利搜索

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发明名称	DRY-ETCHING PROCESS AND ITS USE
摘要
申请公布号	EP0133621(B1)	申请公布日期	1988.03.30
申请号	EP19830107604	申请日期	1983.08.02
申请人	IBM DEUTSCHLAND GMBH;INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	DRUSCHKE, FRANK, DR. DIPL.-CHEM.;KRAUS, GEORG;KUNZEL, ULRICH, DR. DIPL.-CHEM.;RUH, WOLF-DIETER, DIPL.-ING-;SCHAFER, ROLF, DR. DIPL.-MINERALOGE
分类号	C23F4/00;H01L21/302;H01L21/3065;H01L21/3213;H05K3/08;(IPC1-7):H05K3/08;C23F1/00;H01L21/31	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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