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发明名称
WAFER SCRUBBER
摘要
申请公布号
JPS6369236(A)
申请公布日期
1988.03.29
申请号
JP19860211535
申请日期
1986.09.10
申请人
HITACHI LTD
发明人
MIYAMOTO YOSHIAKI;KOMATANI MASATOSHI;SHIMOMURA SHIGEO
分类号
B08B7/04;H01L21/304
主分类号
B08B7/04
代理机构
代理人
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