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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS6358970(A)
申请公布日期
1988.03.14
申请号
JP19860204247
申请日期
1986.08.29
申请人
FUJITSU LTD
发明人
SATO YASUHISA;SAITO TSUTOMU
分类号
H01L21/336;H01L29/78
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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