DRY ADHERING METHOD,申请号JP19870117260-传众专利搜索

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发明名称	DRY ADHERING METHOD
摘要
申请公布号	JPS6353254(A)	申请公布日期	1988.03.07
申请号	JP19870117260	申请日期	1987.05.15
申请人	INTERNATL BUSINESS MACH CORP <IBM>	发明人	KURISUTOFUAA JIYON BERI;JIEROOMU JIYON KUOMO;SHII RICHIYAADO GAANIERI;DENISU SEKON II
分类号	H01L21/28;C23C14/04;C23C14/22;H01L21/20;H01L21/268;H01L21/285;H01L21/31;H01L21/3205;H05K3/14	主分类号	H01L21/28
代理机构		代理人
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