METHOD OF MEASURING LOW FREQUENCY SIGNAL SHAPES INSIDE INTEGRATED CIRCUITS WITH AN ELECTRON PROBE,申请号EP19840110628-传众专利搜索

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发明名称	METHOD OF MEASURING LOW FREQUENCY SIGNAL SHAPES INSIDE INTEGRATED CIRCUITS WITH AN ELECTRON PROBE
摘要
申请公布号	EP0136591(B1)	申请公布日期	1988.03.02
申请号	EP19840110628	申请日期	1984.09.06
申请人	SIEMENS AKTIENGESELLSCHAFT BERLIN UND MUNCHEN	发明人	FAZEKAS, PETER, DIPL.-ING.
分类号	G01R31/26;G01R31/302;G01R31/305;H01L21/66;(IPC1-7):G01R31/28	主分类号	G01R31/26
代理机构		代理人
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