| 发明名称 |
Method of beam centring. |
| 摘要 |
<p>By using, in beam path correction, a three-point adjustment of the beam wobbler, the beam path can be optimized for realizing minimum picture errors in the apparatus. For different lens energizations a picture-shifting correction can simply be carried out dynamically.</p> |
| 申请公布号 |
EP0257679(A1) |
申请公布日期 |
1988.03.02 |
| 申请号 |
EP19870201431 |
申请日期 |
1987.07.24 |
| 申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
BAKKER, JOHAN GUSTAAF;VAN DER MAST, KAREL DIEDERICK |
| 分类号 |
H01J37/04;H01J37/147;H01J37/26;(IPC1-7):H01J37/26 |
主分类号 |
H01J37/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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