APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE,申请号JP19860186334-传众专利搜索

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发明名称	APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS6343316(A)	申请公布日期	1988.02.24
申请号	JP19860186334	申请日期	1986.08.08
申请人	NEC CORP	发明人	ATSUMI KENJI
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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