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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPS6343329(A)
申请公布日期
1988.02.24
申请号
JP19860187120
申请日期
1986.08.08
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YANO KOSAKU;TANIMURA SHOICHI;FUJITA TSUTOMU;KAKIUCHI TAKAO;YAMAMOTO HIROSHI
分类号
H01L21/31;H01L21/3205
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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