发明名称 PRODUCTION APPARATUS FOR SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To remove the stop time of a production apparatus due to the waiting time of a carry system by forming a loader section and an unloader section in the same constitution to the carry system and installing three stations of a charging base, a bench and a completion base. CONSTITUTION:A charging base 6, a bench 7 and a completion base 8 are disposed to a loader section 2', and the loader section 2' has a carry system and a function in which carriers are shifted while a working section 1 is supplied with semiconductor devices, and a charging base 9, a bench 10 and a completion base 11 having the same constitution are arranged to an unloader section 3' in the same manner as the loader section 2', and the unloader section 3' has a carry system and a function in which the carriers are shifted while the semiconductor devices processed by the working section 1 is housed into the carriers. Die bonding, wire bonding, lead working and inspection and working such as marking as the manufacturing process of the semiconductor devices are executed in the working section 1. The semiconductor devices to be worked subsequently are received during the time when working operation is executed, and the completely worked semiconductor devices can be placed under stand-by state ready for conueyance.</p>
申请公布号 JPS6341043(A) 申请公布日期 1988.02.22
申请号 JP19860185739 申请日期 1986.08.06
申请人 MITSUBISHI ELECTRIC CORP 发明人 MIYAMOTO MAMORU
分类号 H01L21/677;H01L21/68 主分类号 H01L21/677
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