发明名称
摘要 An integrated circuit device with multi-level interconnection wiring structure built upon the substrate wherein each level is formed of conductor and insulator portions and wherein each level has a surface substantially parallel to the surface of the substrate.
申请公布号 DE1967363(C2) 申请公布日期 1988.02.18
申请号 DE19691967363 申请日期 1969.06.18
申请人 NIPPON ELECTRIC CO., LTD., TOKIO/TOKYO, JP 发明人 TSUNEMITSU, HIDEO, TOKIO/TOKYO, JP
分类号 H01L21/316;H01L21/768;H01L23/29;H01L23/522;H01L23/528;(IPC1-7):H01L29/78;H01L23/48 主分类号 H01L21/316
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