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发明名称
HEATING ENHANCEMENT OF RESISTIVE EVAPORATION SOURCES IN IONISATION ASSISTED PHYSICAL VAPOUR DEPOSITION
摘要
申请公布号
GB8801291(D0)
申请公布日期
1988.02.17
申请号
GB19880001291
申请日期
1988.01.21
申请人
ION COAT LTD
发明人
分类号
C23C14/30;C23C14/32
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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