| 摘要 |
PURPOSE:To inspect the presence of the surface flaw of a body objectively, quantitatively and automatically, by providing a bright and dark pattern projection apparatus, a medium density part detector and a judge device. CONSTITUTION:A stripe pattern projection apparatus 1 projects a stripe bright and dark pattern to the surface of an article OB to be inspected subjected to the inspection of the presence of a flaw such as unevenness. Subsequently, a medium density part detection apparatus 3 picks up the virtual image of the stripe pattern projected to the surface of the article OB to be inspected and detects a medium density parts not belonging to both of the bright and dark parts of the bright and dark pattern. A judge device 5 extracts the medium density part having a predetermined area or more among the medium density parts detected by the detection apparatus 3 as the surface flaw part of the article OB to be inspected to output an inspection result. By this method, the flaw part such as unevenness on the article to be inspected can be detected automatically and working efficiency can be enhanced. |
