发明名称 |
Environmentally robust micro-wineglass gyroscope |
摘要 |
A method for fabricating an environmentally robust micro-wineglass gyroscope includes the steps of stacking and bonding of at least an inner glass layer and an outer glass layer to a substrate wafer; plastically deforming the inner glass layer into a mushroom-shaped structure and deforming the outer glass layer into a shield capable of extending over the inner glass layer, while leaving the inner and outer glass layers connectable at a central post location; removing the substrate layer and a portion of the inner glass layer so that a perimeter of the inner glass layer is free; and bonding the deformed inner and outer glass layers to a handle wafer. The resulting structure is an environmentally robust micro-wineglass gyroscope which has a double ended supported central post location for the mushroom-shaped structure of the inner glass layer. |
申请公布号 |
US9429428(B2) |
申请公布日期 |
2016.08.30 |
申请号 |
US201514843844 |
申请日期 |
2015.09.02 |
申请人 |
The Regents of the University of California |
发明人 |
Shkel Andrei;Senkal Doruk |
分类号 |
G01C19/00;G01C19/5691;B81C1/00 |
主分类号 |
G01C19/00 |
代理机构 |
|
代理人 |
Dawes Marcus C.;Dawes Daniel L. |
主权项 |
1. A method for fabricating an environmentally robust micro-wineglass gyroscope comprising:
stacking and bonding of at least an inner glass layer and an outer glass layer to a substrate wafer; plastically deforming the inner glass layer into a mushroom-shaped structure and deforming the outer glass layer into a shield capable of extending over the inner glass layer, while leaving the inner and outer glass layers connectable at a central post location; removing the substrate layer and a portion of the inner glass layer so that a perimeter of the inner glass layer is free; and bonding the deformed inner and outer glass layers to a handle wafer. |
地址 |
Oakland CA US |