| 摘要 |
PURPOSE:To obtain a wear resistant film which has the hardness approximate to the hardness of diamond and has excellent environmental resistance by forming ruggedness on the main plane of a substrate and forming a carbon film contg. diamond grains on the main plane. CONSTITUTION:Rugged parts 10 are preliminarily formed to at least one main plane of the substrate 11. A carbon target 21 is sputtered by an ion beam 23 of a gaseous mixture composed of an inert gas and hydrogen or hydrocarbon or gaseous fluorine generated from an ion beam source 22. The generated high- speed particles collide against the main plane of the substrate 11 to form the carbon film 13. The formation of the carbon is accelerated by the rugged parts 10 of the substrate 11 and the diamond grains are formed at this time. The target 21 is then sputtered by the ion beam 23 as the ion beam of the inert gas to form a lubricating layer 14 on the carbon film 13. A sulfide, selenium compd., tellurium compd., halide, fluoride, etc., are usable to form the lubricating layer 14. |
