摘要 |
PURPOSE:To inexpensively and accurately measure a radioactive ray by composing a radiation detector of an amorphous carbon (a-c) semiconductor. CONSTITUTION:A conductive material, such as metal material, e.g., aluminum or a semiconductor material, e.g., silicon, and additionally, an insulating material formed with a conductive electrode are used for a substrate for forming an a-c semiconductor. The a-c semiconductor is made of amorphous carbon (a-c (:H:X), where, X=F, Cl, Br or I) which contains hydrogen or halogen atom X. Further, nitrogen, phosphorus or sulfur is contained in the a-c semiconductor to set the a-c (:H:X) equivalent to a living body. In the a-c semiconductor, since charge equivalent to the living body is generated for all types of radiation species, an accurate dose can be measured by measuring the charge.
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