| 摘要 |
PURPOSE:To rationalize a work for providing a color filter in a solid state image sensing device by providing one or more photodetectors each having a photodetecting surface formed in a suitable shape in the sensing device, and detecting the fact that an alignment mark formed on the filter is aligned with the photodetector according to an electric signal generated by the photodetector. CONSTITUTION:A color filter 10 is disposed on a front surface of a photosensitive region 6, a photodetector 7 and an alignment mark 12 are superposed, and a light is irradiated from the front surface of the mark 12. A semiconductor substrate 5 and the filter 10 are relatively positioned until the quantity of light detected by the photodetector 7 becomes maximum, and when it is confirmed that this is detected by an ammeter A, the filter 10 is bonded to the region 6. The matched state of the photodetector 7 and the mark 12 can be observed as an output current detected by the ammeter A, and the positional displacement becomes minimum when the maximum output current flows. Thus, a machine for automatically positioning it according to the electric signal is facilitated. |
