| 摘要 |
PURPOSE:To stabilize and maintain a high-speed, highly accurate positioning performance for elapse of time, by providing a first guide means, which has moving bodies that are moved in moving direction and constrains the direction orthogonal to the moving plane, and providing a second guide means, which constrains the direction at a right angle to the moving direction and in parallel to the moving plane. CONSTITUTION:The first guide is composed of the following parts: guide rails 2a and 2b, which are fixed on a base table 1; roller bearings 3a and 3b, which are aligned on the surfaces of the rails at a sepcified interval with holders (not shown); and a moving stage 11, which is mounted on the bearings. The second guide is composed of the following parts: guide rails 4a and 4b fixed to the base table 1; a reference roller unit comprising an outer roller wheel 5a attached to the moving stage 11, a roller bearing 6a and a roler shaft 7a; and a compressing roller unit comprising an outer roller wheel 5b, a roller bearing 6b and a roller shaft 7b. Thus, time change in frictional force can be made less remarkably, and the times of maintenaces can be reduced. |
