| 摘要 |
PURPOSE:To produce a thermally decomposed graphite having excellent anisotropy and high orientation at a low temp. by using an Ni substrate for a substrate at the time of depositing the graphite on the substrate by low-temp. thermal decomposition with an arm. compd. as a starting material. CONSTITUTION:The arom. compd. (benzene, etc.) or unsatd. compd. is housed into a bubble vessel 1 and gaseous Ar is supplied form a gaseous Ar control system 2 to execute bubbling, by which compd. particles are fed through a 'Pyrex(R)' glass tube 3 into a quartz reaction tube 4. The supply rate and density to the reaction tube 4 are regulated by a valve 5 and a dilution line 6 in this stage. An Ni base material is used for the substrate to be imposed on a sample base 7 in the reaction tube and the Ni substrate is held at about 1,000 deg.C or below by a heating furnace 8 to form the thin graphite film on the Ni substrate. The thin graphite film which has the uniform film thickness and has metallic gloss coupled with the improved crystallinity is thus obtd. |
