| 摘要 |
PURPOSE:To contrive improvement in workability of the titled device by a method wherein a table which can be synchronously and intermittently rotated is arranged in two stories, the upper and the lower ones, and a shifting stand with which a cassette case placed along said table will be moved to a cassette placing chamber is provided, thereby enabling to automatically charge the cassette case in succession. CONSTITUTION:A table 2 is attacted to the rotating shaft 4, which is vertically provided on a machine frame 3, in two stories of the upper and the lower ones through the intermediary of a boss 5. A shifting stand 7 travels on the base stand fixed to the lower part of each table 2, and conveys a cassette case 1 between the table 2 and the cassette case housing chamber 10 of a wafer surface processing device 9 such as an ion- implanting device and the like. Each vertically-moving table 15 of the shifting stand 7 located at the lower part of each table 2 is moved up by a cylinder 14, and the case 1 located at the upper part of a protruded piece 13 is moved up. Then, the shifting table 17 of each shifting stand 7 moves to the cassette case housing chamber 10 of the surface processing device together with a horizontally-moving table 18 by a cylinder 19. When an engaging pawl 36 of a revolving device 6 is disconnected and a cylinder 35 is extended, the upper and the lower tables 2 and 2 are rotated synchronously, and the next cassette case 1 is positioned on the shifting stand 7. |
