| 摘要 |
PURPOSE:To easily correct an amount of irradiation by providing an irradiation time modulation correcting calculator, and an electron beam irradiation time table memory for storing irradiation time correction value at each scanning point. CONSTITUTION:A signal of a memory 2 and a signal of a pattern data memory 1 are processed by a convolution adder 3, and the result is transferred as an X-direction full scattering data to a buffer memory 4. Similarly, in Y-direction, Y-direction full scattering data is transferred to a buffer memory 4' by a memory 2' and a convolution adder 3'. An irradiation time modulation correction calculator 5 multiplies the contents of buffer memories 4, 4' of X-and Y- directions to evaluate the scattering intensity on one lithographic scanning point. Its reciprocal is employed to obtain an effective emitting time correction value. This value is transferred to an irradiation time table memory 6. Thus, the amount of irradiation can be easily corrected.
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