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发明名称
SILICON SEMICONDUCTOR DEVICE
摘要
申请公布号
EP0231656(A3)
申请公布日期
1987.12.23
申请号
EP19860310129
申请日期
1986.12.24
申请人
HITACHI, LTD.
发明人
SAITOH, TADASHI;MIYAZAKI, TAKAO;KOKUNAI, SHIGERU
分类号
H01L29/73;H01L21/331;H01L29/161;H01L29/267;H01L29/732;H01L29/737;(IPC1-7):H01L29/267;H01L29/72;H01L29/86
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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