| 摘要 |
PURPOSE:To prevent a radiation light-drawing out window from being broken and deteriorated so that a device has long-term reliability, by equipping the device with an enclosed chamber, in which a radiation light-drawing out window and a radiation light-transmitting window are involved, and a gas pressure regulator for regulating the pressure of the gas introduced into the chamber. CONSTITUTION:In a X-ray exposure device in which synchrotron radiation light drawn out from a radiation light-drawing out window 5 disposed on the pointed end of a beam line 4 is radiated through a mask 6 and on a processed matter W coated with a X-ray resist R, a radiation light-transmitting window 9 is formed on the back stage of the radiation light-drawing out window 5. Besides, an enclosed chamber 10, in which the radiation light-drawing out window 5 and the radiation light-transmitting window 9 are involved, and a gas pressure regulator 12 for regulating the pressure of the gas introduced into the chamber 10 are formed there. For example, usual Be foil is used in the radiation light-drawing out window 5, and on the other hand, an organic film made of Kapton, Mylar, or the like, or an inorganic film such as a silicon nitride film, boron nitride film is used in the radiation light-transmitting window 9. Helium or nitrogen gas is used as the gas introduced into the chamber 10, and its pressure is set in the range less than 1 and more than about 1/10 in barometric pressure. |
