ELECTROPHOTOGRAPHIC SENSITIVE BODY HAVING SILICON NITRIDE CARRIER IMPLANTED LAYER

摘要

PURPOSE:To provide a titled photosensitive body which has wide spectral sensitivity in a visible region and is a harmless material to obviate the exertion of an adverse influence on the human body by using a silicon nitride film as a carrier implanted layer between a carrier generating layer and carrier transfer layer. CONSTITUTION:Hydrogenated amorphous silicon a-Si:H is used for the carrier generating layer CGL2 and the silicon nitride SixNy having the intermediate band gap of the band gaps of the a-Si:H and the carrier transfer layer 3 material is used for the carrier implanted layer 4. The spectral sensitivity is thereby widened and the sensitivity is additionally improved. Since the SixNy is chemically and physically stabler than the a-Si:H, the higher stability with solvents during the formation of the carrier transfer layer 3 is obtd. and further, the problem of environmental pollution is averted.