| 摘要 |
PURPOSE:To enable highly accurate measurement of an amount of displacement economically, by obtaining the amount of displacement using two detecting signals. CONSTITUTION:A sensor is composed of cylindrical glass bolts 6a, 6b provided with light-receiving surfaces exposed to the bottom of a light guide holder 3 and light-receiving elements 7a, 7b arranged on the upper ends of them. These bolts 6a, 5b guide beams of light irradiated from the bottom surfaces of them to the elements 7a, 7b. By these arrangements, a displacement of a specimen relative to the reference point P causes increase or decrease of quantity of scattered light in accordance with this displacement. This is amplified 13 and converted by a detecting circuit 14 to a displacement quantity signal for issuance as an output. This signal represents a displacement value obtained based upon a quantity of the scattered light. Consequently, 12 the displacement quantity signal issued out of the circuit 14 is obtained based upon two quantities of the scattered light, high accuracy can be available. Further, highly accurate displacement amount signal unaffected by the change of the quantity of scattered light can be produced.
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