发明名称 Method of examining and testing an electric device such as an integrated or printed circuit
摘要 PCT No. PCT/CH84/00081 Sec. 371 Date Jan. 18, 1985 Sec. 102(e) Date Jan. 18, 1985 PCT Filed May 22, 1984 PCT Pub. No. WO84/04819 PCT Pub. Date Dec. 6, 1984.This method is based on the radiation-matter interaction in a structure having discontinuities and where electron transport occurs in at least one layer. To this end, a stimulation signal is sent through the device under test and simultaneously at least one source of radiation sends incident radiation towards the surface of the device. The secondary radiation emitted by the device is detected together with the response of the device. The signals are compared, either individually or in combination, with a reference.
申请公布号 US4712057(A) 申请公布日期 1987.12.08
申请号 US19850705341 申请日期 1985.01.18
申请人 BATTELLE MEMORIAL INSTITUTE 发明人 PAU, LOUIS F.
分类号 G01R31/28;G01R19/00;G01R19/155;G01R31/302;G01R31/304;G01R31/305;G01R31/308;(IPC1-7):G01R31/02 主分类号 G01R31/28
代理机构 代理人
主权项
地址