发明名称 ELECTROOPTIC TYPE DISPLACEMENT MEASURING INSTRUMENT
摘要 PURPOSE:To make the best preparations for measurement and the best measurement and to performing accurate and proper measuring and analyzing operations without any special skillfulness by selecting a measurement mode and also making a mode selection for a write test. CONSTITUTION:A target 1 is acquired by a lens 2 and its image is formed on the photocathode surface 3a of an image detector tube 3 and converted into an electron image, and a passing electron beam is multiplied and led out of the anode 3d, and amplified by an amplifier 8 and then supplied to a CPU 11 through a data sampling circuit 9 and an A/D converter 10. The CPU 11 while measuring displacement from the frequency and amplitude of a signal impressed to horizontal and vertical axis deflecting coils 4 and 5 through a D/A conversion part 12 supplies the signal to a mode selecting circuit 14 and a write test L.T. Selecting circuit 15 through an A/D converting circuit 13 to select the measurement mode and also makes the mode selection for the write test as one stage of the preparations for the measurement, and one of lighting, a high voltage, and a lock voltage is adjusted to adjust the target, its environmental lighting state, etc.
申请公布号 JPS62280614(A) 申请公布日期 1987.12.05
申请号 JP19860123582 申请日期 1986.05.30
申请人 YA MAN LTD 发明人 YAMAZAKI IWAO;YAMAZAKI MITSUHIDE;SAKAMOTO KATSUMI
分类号 G01D5/26;G01B11/00 主分类号 G01D5/26
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