| 摘要 |
PURPOSE:To obtain a high sensitivity humidity sensor, by a method wherein a copolymer of N, N-dimethylaminoethylacrylamide or N, N- dimethylaminopropylacrylamide and a vinyl monomer is quaternized and perchlorate is added to the quaternized one to make the same hydrophobic and the obtained hydrophobic copolymer is applied to an Al2O3 substrate to form a film. CONSTITUTION:About 50-90mol%, pref., about 70-80mol% of N, N- dimethylaminoethylacrylamide or N, N-dimethylaminopropylacrylamide is mixed with a vinyl monomer and the resulting mixture is copolymerized in the presence of benzene and AIBN being a polymerization initiator while the bubbling of N2-gas is applied to said mixture and, subsequently, alkyl halide, for example, methyl iodide, a nitromethane solvent and benzene are added to the reaction solution to quaternize the formed copolymer at 60 deg.C. The quaternized copolymer is precipitated and purified using diethyl ether and made hydrophobic by the addition of LiClO4. The obtained copolymer is applied to an Al2O3 substrate using a Pt/Pd paste to form a film and aging of AC4V, 13hr is applied to the film. A humidity-resistance characteristic can be freely changed by the kind of perchlorate.
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