| 摘要 |
PURPOSE:To enable measurement free from the generation of bending of leads, cracking and chipping with objects to be measured housed in a tray, by relatively moving the tray, where a plurality of objects being measured are arranged regularly in the XY direction, and a test head positioned thereabove. CONSTITUTION:A test head 1 is held by a support arm and electrically connected to a probe card 3 with a conductor. The probe card 3 can be moved finely in the XY direction and is provided with probes (contact members) 6 with the number the same or more than that of leads 5 that are external terminals of a leadless tip carrier (LCC) 4. A mount 7 of a tray 8 can be moved roughly in the XY direction and is movable vertically. Positioning pins 9 provided on the mount 7 are run through holes 10 at four corners of the tray 8 to position it 8, the mount 7 is moved to a position where the probes 6 faces the leads 5 of the LCC 4 and then the probe card 3 is lowered finely to bring the leads 5 into contact with the probes 6. Thus, a testing is made.
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