| 摘要 |
PURPOSE:To enhance sensitivity and to minimize the irregularity of a characteristic between elements, in a hydrogen sensor constituted of a laminated structure of a catalytic metal and a solid compound, by forming the solid compound into a crystal film having a high orientation property with respect to a crystal surface of a predetermined index. CONSTITUTION:A clean glass substrate 1 is set to a vacuum vapor deposition apparatus and a WO3 powder is thrown in a vapor deposition source 4 to perform vapor deposition according to a resistance heating method until a predetermined film thickness is obtained. At this time, the crystal film of WO3 is formed by heating the glass substrate 1 to a predetermined temp. and, at the same time, the quality of the WO3-film vapor-deposited on the glass substrate 1 is controlled so as to have a high orientation property with respect to a crystal surface of a predetermined index, for example, a (001) surface. This can be realized by arranging the glass substrate 1 directly above the vapor deposition source. The WO3-film thus formed is annealed in oxygen gas and, subsequently, Pd is applied to the surface of the WO3-film formed on the glass substrate as a catalytic metal, for example, by sputtering. |
