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发明名称
CHARGED PARTICLE APPARATUS
摘要
申请公布号
JPS62254400(A)
申请公布日期
1987.11.06
申请号
JP19860097721
申请日期
1986.04.25
申请人
MITSUBISHI ELECTRIC CORP
发明人
IKEGAMI KAZUNORI;OKUDA SOICHIRO
分类号
H05H13/04
主分类号
H05H13/04
代理机构
代理人
主权项
地址
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