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发明名称
CONTINUOUS SPUTTERING APPARATUS
摘要
申请公布号
EP0136562(A3)
申请公布日期
1987.10.28
申请号
EP19840110398
申请日期
1984.08.31
申请人
HITACHI, LTD.
发明人
TATEISHI, HIDEKI;SHIMIZU, TAMOTSU;AIUCHI, SUSUMU;IWASHITA, KATSUHIRO;NAKAMURA, HIROSHI
分类号
B65G49/07;C23C14/34;C23C14/56;H01L21/203;(IPC1-7):C23C14/56
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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