| 摘要 |
PURPOSE:To obtain a mass-producible small-sized differential pressure/capacity transducer having an extremely simple structure by providing the device with a diaphragm to be used as both a seal diaphragm and a sensor diaphragm. CONSTITUTION:The diaphragm 2 has a shape forming a recessed part on the surface of the insulator 11 side and airtightly adhered to a case 1. The insulator 11 side opposed to the diaphragm 2 has an electrode 4 formed by evaporation and sealing tubes 5, 6 into which liquid 9 such as silicone oil is sealed are formed in the insulator 11. A pressure guiding port 101 is formed on a position of a flange 10 opposed to the diaphragm 2 of a flange 10. A signal processing part 111 takes out a signal from a lead wire connected to the electrode 4. The materials of the case 1, the insulator 11, the diaphragm 2, the read wire 8, the sealing tubes 5, 6, etc. have approximate thermal expansion coefficient each other. |
