发明名称 BAKEABLE CRYOPUMP
摘要 A bakeable cryopump having a housing and means to removeably receive the displacer end of a cryogenic refrigerator to cool internal cryopanels said cryopumps adapted for removal of the refrigerator without loss of vacuum inside the cryopump and further adapted to be heated under vacuum to remove pumped gases primarily water so that the cryopumps after cooling can be used at vacuum of at least 10-10 Torr.
申请公布号 DE3466036(D1) 申请公布日期 1987.10.15
申请号 DE19843466036 申请日期 1984.03.15
申请人 AIR PRODUCTS AND CHEMICALS, INC. 发明人 BONNEY, GLENN ERIC;LONGSWORTH, RALPH CADY
分类号 F04B37/08;F25D19/00;(IPC1-7):F04B37/08 主分类号 F04B37/08
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