| 摘要 |
PURPOSE:To improve picture quality of obtained images, by getting a correlation by two times horizontal scanning of the electron beams on the same position of a specimen and displaying the result of correlation as one time horizontal scanning signal of a cathode ray tube. CONSTITUTION:Electron beams 2 emitted from an electron gun 1 are finely diaphragmed by a convergent lens 3 and an objective 4 and radiated on specimen 5. By a signal from a scanning signal trigger circuit 8, a wave form of the scanning signal is formed by a scanning signal circuit 9, and impressed to deflection coils 6 and 7. Through deflection emplifiers 10 and 11. In scanning of the electron beams 2 for the specimen 5, two times of a horizontal scanning is carried out on the same place of the specimen, and a correlation between the first and the second scannings is obtained. Thus, a signal with reduced these noise components is obtained and by display it on a cathode ray tube, picture quality of images by a scanning electron microscope can be improved.
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