| 摘要 |
PURPOSE:To detect very small amount of impurities in an oxygen gas at a high sensitivity, by mixing hydrogen gas in an oxygen gas which is a sample, or by adding hydrogen gas to the sample oxygen gas. CONSTITUTION:A sample oxygen gas 20 is supplied by an oxygen gas cylinder 1. And hydrogen gas 21 to be mixed in the sample oxygen gas 20 is supplied by a hydrogen gas cylinder 2. A flow adjuster 3 is furnished to adjust the mixing ratio of the hydrogen gas 21 to the oxygen gas 20 at an optimum condition. When the hydrogen gas is mixed in the oxygen gas, the amount of the hydrogen gas is made less than 3.9% of the all, or 99.9% or more, exceeding 95.8%. And the amount of the hydrogen gas 21 is made 100ppm or more. The hydrogen gas 21 is mixed in the oxygen gas 20 by a mixer 5 after passing through a trap 4. For the hydrogen gas 21 in this case, a mixed gas consisting of hydrogen and oxygen can be used.
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