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发明名称
摘要
申请公布号	JPS62153531(U)	申请公布日期	1987.09.29
申请号	JP19860043505U	申请日期	1986.03.24
申请人		发明人
分类号	G01J1/02;G01J5/02;G01J5/28;H01L31/00;H01L31/0232;H01L31/09;(IPC1-7):G01J1/02	主分类号	G01J1/02
代理机构		代理人
主权项
地址

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