| 摘要 |
PURPOSE:To inject a large quantity of gas in a gas laser oscillator without fail by rapidly injecting laser gas from the side of a body vessel when the laser oscillator is prepared to operate, and continuously or intermittently injecting the gas from the side of a resonator when the oscillator is operated. CONSTITUTION:When a first solenoid valve 21 is opened, laser gas is supplied from in inlet 17 through a communicating tube 19 into a body vessel 5 of a laser oscillator 1, and rapidly injected until becoming a set pressure. When the pressure of the gas comes predetermined, a solenoid valve 21 is closed, and a second solenoid valve 31 is opened. When the valve 31 is opened, the gas is slowly injected from an inlet 23A or 23B provided at front mirror 15A or rear mirror 15B of the resonator through communicating tubes 28, 25 or 29, 27 at a flow rate (speed) set by a flow rate controller, not shown. Thus, the contamination or damage of the resonator can be eliminated due to gas diffusion, and the gas can be injected safely in a short time. As a result, rising time can be shortened. |
