| 摘要 |
PURPOSE:To prevent the damage of sensor itself even when acceleration of a rated value or more is applied by holding a sensor substrate by a susceptor, in which proper spaces are formed to the upper and lower sections of a superposing section and a deflection section, and a cover. CONSTITUTION:An acceleration sensor has structure in which a sensor substrate 1 is held by a susceptor 20 and a cover 10 and fixed by adhesives 8 and a superposing section 4 and a deflection section 5 are hermetically sealed in response to recessed sections 12, 22 in both substrate 20, 10. In this case, measurable maximum acceleration is obtained at a point where the nose of the superposing section 4 is brought into contact with the bases 12, 22 of the susceptor 20 and the cover 10, and maximum stress sigmamax generated in the surface of the deflection section 5 is acquired when the whole surface of the superposing section 4 is brought into contact with the bases 12, 22 of the susceptor 20 and the cover 10. Consequently, sigmamax>sigmaa holds when stress generated in the surface of the deflection section when measurable maximum acceleration is applied is represented by sigmaa. Accordingly, the damage of the deflection section as seen in conventional devices can be prevented.
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