发明名称 ENERGY SENSITIVE COMPOSITION AND PATTERN FORMING METHOD USING SAID COMPOSITION
摘要 PURPOSE:To make the decomposition of a sensing agent hardly stoppable by dissolving the sensing agent and matrix polymer in a solvent having a small radical chain transfer constant. CONSTITUTION:The sensing agent which induces radical type self-transfer decomposition by an energy ray e.g.: poly(2-methyl-1-pentene-sulfone) and the matrix polymer which is modulated in solubility by said agent (e.g.: alkali-soluble phenolic resin) are dissolved in the solvent such as, for example, xylene or toluene, having the small radical chain transfer constant. The decomposition of the sensing agent is hardly stoppable if the above-mentioned solvent is used. As a result, the compsn. which has high sensitivity, decreases residues and is hardly reversible to negative is obtd.
申请公布号 JPS62211639(A) 申请公布日期 1987.09.17
申请号 JP19860055671 申请日期 1986.03.12
申请人 NEC CORP 发明人 IIDA YASUO
分类号 G03C1/00;G03C1/72;G03F7/004;G03F7/038;G03F7/039;G03F7/32 主分类号 G03C1/00
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