发明名称 PLASMA X-RAY GENERATOR
摘要 PURPOSE:To improve the plasma focusing efficiency, by applying to the inner cylindrical electrode a high voltage pulse of negative polarity opposite to the outer cylindrical electrode. CONSTITUTION:While a negative polarity high voltage is applied to the inner cylindrical electrode 1 from a charged capaciter 5, a positive polarity voltage is applied to the outer cylindrical electrode 2. In a discharge space 7 separated from the outside by a discharge container 4, a gas such as neon, argon, or kripton is filled. When a voltage is applied between the electrodes, a dielectric breakdown is produced on the surface of an insulator 3, to generate plasma. The plasma receives a Lorentz's force from the electric field and the magnetic field between the electrodes, moves to the opening end of the electrodes, and is pinched by the pressure of the magnetic field when it passes the end of the electrodes. The plasma of a high temperature and a high density is formed on the axis of the top of the electrode 1, and soft X-rays are radiated.
申请公布号 JPS62206753(A) 申请公布日期 1987.09.11
申请号 JP19860048258 申请日期 1986.03.07
申请人 HITACHI LTD 发明人 KATO YASUO;OCHIAI ISAO;WATANABE YOSHIO;MURAYAMA SEIICHI
分类号 H01J35/22;H01L21/027;H01L21/30;H05G2/00 主分类号 H01J35/22
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