THIN FILM FORMING DEVICE,申请号JP19850177881-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPS6240365(A)	申请公布日期	1987.02.21
申请号	JP19850177881	申请日期	1985.08.13
申请人	TOYOTA MOTOR CORP	发明人	NAKANO KENJI
分类号	C23C14/22	主分类号	C23C14/22
代理机构		代理人
主权项
地址

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