| 摘要 |
PURPOSE:To facilitate the maintenance of an automatic feeder by passing part of clean air supplied from a ceiling air supplying unit toward a floor into an automatic feeder body having a hole communicating the top thereof with the bottom thereof. CONSTITUTION:Dusts generated from the elevating mechanism 21 of an automatic feeder body 20, an arm support 31 and a feeding mechanism 23 and dusts generated by the friction between traveling wheels 38 and rails 14 are sucked when the falling air stream of clean air supplied from an air supplying unit 5a disposed at the ceiling of a clean room K toward a floor is blown through the space 20a of an automatic feeder M, exhausted together with the air from a porous floor 7 to a freely access floor 8 to prevent the dusts from being diffused into a working chamber 10. The dusts generated from the movable portion of an arm mechanism are sucked to the space 20a by utilizing the fact that the flowing velocity of the air flowing through a venturi 41 is accelerated so that a hose 42 becomes a negative pressure to be exhausted together with the air passing therethrough to the floor 8.
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