| 摘要 |
PURPOSE:To improve the output and efficiency of a transverse excitation type pulse laser oscillator by starting the charging of a capacitor connected in parallel with a main electrode pair, operating a reserve ionization mechanism after a predetermined time lag and making the rise of the reserve ionization mechanism faster than that of voltage between the main electrode pair. CONSTITUTION:A signal from a trigger control circuit 13 is transmitted over a pulse discharging circuit 10 for main discharge first. Consequently, the pulse charging of a peaking capacitor 4 is started, and voltage Vg between main electrodes 1, 2 begins to rise. A signal is transmitted over a pulse charging circuit 12 for reserve ionization from the trigger control circuit 13 after a fixed time passes after Vg begins to rise, and the charging of a peaking capacitor 11 for spare ionization is started after tp time after the application of voltage between the main electrode pair 1, 2. Arc discharge is generated between the reserve ionization electrode pair 3a, 3b, and reserve ionization is conducted extending over the whole regions of a discharge excitation section 5 by the generation of ultraviolet beams 6. Voltage Vg between the main electrodes 1, 2 reaches break-down voltage VB between the main electrodes 1, 2 reaches break-down voltage VB and main discharge is started, and laser beams are projected in the direction of an optical axis 8. Accordingly, the reserve ionization is performed after the rise of Vg, thus increasing break-down voltage VB. |
