| 摘要 |
PURPOSE:To keep favorable positioning accuracy by detecting internal pressure in plural elastic tube structures and adjusting gain of set point adjusting means according to the pressure values. CONSTITUTION:Pressure detectors 9A, 9B are disposed in dust lines 7A, 7B connected to elastic tube structures 2A, 2B. Outputs from the pressure detectors 9A, 9B are input to averabe arithmetic means 29 through lowpass filters 28A, 28B, and according to an output from the average arithmetic means 29, gain of displacement set point adjusting means 13 is adjusted. Thus, when bias pressure of the elastic tube structures 2A, 2B is changed, the amplification factor of the displacement set point adjusting means 13 is changed, interlocking with the above change, so that the bias pressure of the elastic tube structures 2A, 2B can be changed without changing the displacement of a driving mechanism to keep favorable positioning accuracy.
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