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发明名称
PLASMA GENERATOR
摘要
申请公布号
JPS62180998(A)
申请公布日期
1987.08.08
申请号
JP19860021204
申请日期
1986.02.04
申请人
EBARA CORP
发明人
HIGO TSUTOMU;KINOSHITA TAKAHIRO
分类号
H05H1/34;B05B7/22;B23K9/26;B23K10/00
主分类号
H05H1/34
代理机构
代理人
主权项
地址
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