| 摘要 |
PURPOSE:To prevent the rolling of a boat, by holding one end of the boat, on which semiconductor substrates are mounted, with one end of the inside of a longitudinal reacting tube, and providing a jig, which holds the other end of the boat. CONSTITUTION:One end of a boat 2 is engaged with the central part of a jig 7, which prevents the rolling of the boat 2 so as to hold the boat in such a way that the boat 2 is freely rotated. For example, an annular hole 7a is formed. At first, silicon substrates 1 as samples are mounted on the boat 2, which is inserted into the inside of a reacting tube 3. In order to form a uniform film on the silicon substrates 1, the rotary motion is imparted to the boat 2. The hole 7a of the jig 7 is engaged with one end of the boat 2 against the vibration from the outside. Thus the increase in rolling can be prevented.
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