| 摘要 |
PURPOSE:To immediately find out the inclined position of a sample inclined in an arbitrary direction, by providing a sample rotation means, input means for entering the quantity of rotation of the sample, a calculation means for calculating the inclined position of the sample, and display means for displaying the inclined position. CONSTITUTION:A sample is rotated by a sample rotation means 48 to change the angle of irradiation of an electron beam upon the sample. The quantity of the rotation of the sample by the means 48 in entered by input means 2, 3. The inclined position of the sample is calculated by a calculation means 46 in terms of the quantity of the rotation of the sample. The inclined position of the sample is displayed by a display means 7, 8. The inclined position of the sample inclined in an arbitrary direction can thus be immediately found out without using a microscope after the sample is rotated.
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