发明名称 THIN FILM MAGNETIC HEAD
摘要 PURPOSE:To prevent the decrease of the insulation resistance between a magneto-resistance effect element and thin metallic film by forming a thin insulator film on the 1st thin metallic film formed by etching for the purpose of impressing a magnetic bias then forming the magneto-resistance effect element by etching in a manner as to overlap on the etching taper of at least the 1st thin metallic film. CONSTITUTION:After a bias film 2 is formed by sputtering or vapor deposition, the film is etched to a prescribed shape and the thin insulator film SiO2 3 is formed by sputtering. The MR element 4 is formed by dry etching with a resist pattern 5 as a mask so as to overlap on the etching taper of the bias film 2 in the formation of said element. The thin insulator film 3 on the etching taper of the bias film 2 is thoroughly protected from the over etching if the head is constructed in the above-mentioned manner. The electrical contact with the bias film 2 is thus obviated even if an electrode 7 is formed.
申请公布号 JPS62180513(A) 申请公布日期 1987.08.07
申请号 JP19860021914 申请日期 1986.02.05
申请人 HITACHI LTD 发明人 KATO SHIGEKI;TSUKADA YUKIHISA;TAKEURA TORU
分类号 G11B5/39 主分类号 G11B5/39
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