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发明名称
SUBSTRATE DIVIDER
摘要
申请公布号
JPS62173200(A)
申请公布日期
1987.07.30
申请号
JP19850191651
申请日期
1985.08.30
申请人
SANKO SEIKI SEISAKUSHO:KK
发明人
KUZUHARA KOZO
分类号
H01L21/301;B26F3/00;B28D5/00;H05K3/00
主分类号
H01L21/301
代理机构
代理人
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